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Electronic flowmeter 8500

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Maker: KOFLOC – Japan
Model: 8500MC-0-1-2
Flow range: 10 SCCM – 20 SML (N2 equivalent 20◦C/1ATM) (freely selectable)
Sensor type: Thermal sensor
Valve tye: Normally closed proportional solenoid valve.
Control range: 2 – 100% (F.S)
Allowable operating pressure: 500 kPa (G) or less
Proof pressure: 980kPa (G)